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Fabrication of phosphor micro-grids using proton beam lithography

✍ Scribed by V. Auzelyte; M. Elfman; P. Kristiansson; J. Pallon; M. Wegdén; C. Nilsson; K. Malmqvist; B.L. Doyle; P. Rossi; S.J. Hearne; P.P. Provencio; A.J. Antolak

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
316 KB
Volume
242
Category
Article
ISSN
0168-583X

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Nickel stamps with micro and nano-scale relief features on their surfaces have been fabricated using proton beam writing coupled with nickel sulfamate electroplating. A focused beam of sub-micron 2.0 MeV protons was used to direct-write 3D patterns into spin coated PMMA resist, and a single step nic