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Direct fabrication of micro/nano fluidic channels by electron beam lithography

✍ Scribed by Daniel M. Koller; Nicole Galler; Harald Ditlbacher; Andreas Hohenau; Alfred Leitner; Franz R. Aussenegg; Joachim R. Kren

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 261 KB
Volume: 86
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.11.025

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