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Fabrication of phase masks with sub-half micron resolution by electron beam lithography

✍ Scribed by E. Di Fabrizio; L. Grella; M. Gentili; M. Baciocchi; L. Mastrogiacomo; F. Vaninetti; F. Fontana


Book ID
114155752
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
315 KB
Volume
41-42
Category
Article
ISSN
0167-9317

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