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Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices

โœ Scribed by Fan Liu; Kheng Boon Tan; P. Malar; S.K. Bikkarolla; J.A. van Kan

Book ID
119324760
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
706 KB
Volume
102
Category
Article
ISSN
0167-9317

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โœ P.G. Shao; J.A. van Kan; L.P. Wang; K. Ansari; A.A. Bettiol; F. Watt ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 444 KB

A technique has been developed for the rapid prototyping of enclosed micro/nano polymethyl methacrylate (PMMA) fluidic systems using proton beam writing (PBW) and thermal bonding. Micro/nano structures consisting of channels and reservoirs were fabricated in a PMMA resist layer coated on to a Kapton