Soft-lithographic methods for the fabrication of dielectrophoretic devices using molds by proton beam writing

✍ Scribed by Y. Shiine; H. Nishikawa; Y. Furuta; K. Kanamitsu; T. Satoh; Y. Ishii; T. Kamiya; R. Nakao; S. Uchida

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 573 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.12.071