Fabrication of NB-based Josephson junctions using low-energy ion beam cleaning
β Scribed by Koichi Usami; Chan Hun Park; Masataka Moriya; Tadayuki Kobayashi; Toshinari Goto; Seiichi Matsui
- Book ID
- 112078865
- Publisher
- John Wiley and Sons
- Year
- 1994
- Tongue
- English
- Weight
- 610 KB
- Volume
- 77
- Category
- Article
- ISSN
- 8756-663X
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High quality Nb films with superconducting Tc'S of 9.3 K and residual resistance ratios of 3-5.5 have been fabricated by e-beam evaporation in an ordinary high vacuum system. Nb/Pb tunnel junctions of good quality (Vm ~ 13 mV,jc ~ 400 A cm -2) were prepared using an ion beam oxidation technique. The
We report on the fabrication of YBCO-Josephson-junctions using a narrow-focused Ga-ion beam to damage the MgO-substrates prior to film deposition. On top of the micro-areas damaged by the ion-beam, the as-grown YBCO-film shows weak-link properties. The final junction was achieved using photolithogra