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Fabrication of nanoscale metallic air-bridges by introducing a SiO2 sacrificial layer

✍ Scribed by Yang Zhang; Jian Liu; Yan Li; Fuhua Yang

Book ID: 103846621
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 781 KB
Volume: 10
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2007.11.004

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