✦ LIBER ✦
SIMS depth profiling of Si/SiO2/Si layers by using self-sputtered Ga+ from a gallium liquid metal ion source
✍ Scribed by Antonino Licciardello; Alberto Torrisi; Salvatore Pignataro
- Book ID
- 104592348
- Publisher
- John Wiley and Sons
- Year
- 1989
- Tongue
- English
- Weight
- 426 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0142-2421
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