Fabrication of nano-crystalline silicon thin film at low temperature by using a neutral beam deposition method

✍ Scribed by Se-Koo Kang; Min-Hwan Jeon; Jong-Yoon Park; Hyoung-Cheol Lee; Byung-Jae Park; Je-Kwan Yeon; Geun-Young Yeom

• Book ID: 108166083
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 406 KB
• Volume: 312
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/j.jcrysgro.2010.04.024