Formation of polycrystalline silicon films on glass substrates at low-temperatures by a direct negative Si ion beam deposition system

✍ Scribed by D.J. Choi; Y.H. Kim; D.W. Han; H.K. Baik; S.I. Kim

• Book ID: 108342750
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 284 KB
• Volume: 191
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/s0022-0248(98)00370-4