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Fabrication of micro sloping structures of SU-8 by substrate penetration lithography

✍ Scribed by J. Onishi; K. Makabe; Y. Matsumoto

Book ID
106185491
Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
435 KB
Volume
14
Category
Article
ISSN
0946-7076

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## Abstract In this work, the process of spin dewetting of a polymer solution on a topographically patterned PDMS mold was used for fabrication of micro‐ and nanaoscale polymer structures. Spin coating was used to provide a fast and reproducible coating. This simple technique was capable of produci