✦ LIBER ✦
Distortion of 3D SU8 photonic structures fabricated by four-beam holographic lithography withumbrella configuration
✍ Scribed by Zhu, Xuelian; Xu, Yongan; Yang, Shu
- Book ID
- 115408436
- Publisher
- Optical Society of America
- Year
- 2007
- Tongue
- English
- Weight
- 870 KB
- Volume
- 15
- Category
- Article
- ISSN
- 1094-4087
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