✦ LIBER ✦
Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique
✍ Scribed by Wen Dai; Wanjun Wang
- Publisher
- Springer-Verlag
- Year
- 2008
- Tongue
- English
- Weight
- 311 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0946-7076
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