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Fabrication of high electron mobility transistors with T-gates by nanoimprint lithography

โœ Scribed by Y. Chen; D. Macintyre; E. Boyd; D. Moran; I. Thayne; S. Thoms


Book ID
121663576
Publisher
AVS (American Vacuum Society)
Year
2002
Tongue
English
Weight
494 KB
Volume
20
Category
Article
ISSN
0734-211X

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