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Fabrication of halfmicron MOSFETs by means of x-ray lithography

✍ Scribed by V. Lauer; F. Bauer; J. Korec; H.-L. Huber; P. Balk

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 299 KB
Volume: 6
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(87)90040-2

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