✦ LIBER ✦
High contrast synchrotron x-ray lithography by means of silicon based masks and magnesium beam windows
✍ Scribed by H. Lüthje; M. Harms; A. Bruns
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 631 KB
- Volume
- 3
- Category
- Article
- ISSN
- 0167-9317
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