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Fabrication of (100) Orientated PZT Thin Films for MEMS Applications

โœ Scribed by Zhao, Hong-Jin; Ren, Tian-Ling; Liu, Jian-She; Liu, Li-Tian; Li, Zhi-Jian

Book ID
126998129
Publisher
Taylor and Francis Group
Year
2002
Tongue
English
Weight
281 KB
Volume
46
Category
Article
ISSN
1058-4587

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