✦ LIBER ✦

Printing of uniform PZT thin films for MEMS applications

✍ Scribed by Bathurst, S.P.; Kim, S.G.

Book ID: 120242899
Publisher: International Academy for Production Engineering
Year: 2013
Tongue: English
Weight: 618 KB
Volume: 62
Category: Article
ISSN: 0007-8506
DOI: 10.1016/j.cirp.2013.03.113

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Fabrication of (100) Orientated PZT Thin

Fabrication of (100) Orientated PZT Thin Films for MEMS Applications

✍ Zhao, Hong-Jin; Ren, Tian-Ling; Liu, Jian-She; Liu, Li-Tian; Li, Zhi-Jian 📂 Article 📅 2002 🏛 Taylor and Francis Group 🌐 English ⚖ 281 KB

Piezoelectric and electrical properties

Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications

✍ Seong Kon Kim; Cheol-Su Kim; Kyung Wha Lee; Sang Yeol Lee 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 291 KB

PZT Thin Films from Bulk PZT for Vibrati

PZT Thin Films from Bulk PZT for Vibration Power Harvester Applications

✍ Deng, Yong; Li, Yi Gui; Yang, Chun Sheng; Liu, Jing Quan; He, Dan Nong; Sugiyama 📂 Article 📅 2011 🏛 Trans Tech Publications, Ltd. 🌐 English ⚖ 568 KB

Optical characterization of PZT thin fil

Optical characterization of PZT thin films for waveguide applications

✍ J. Cardin; D. Leduc; T. Schneider; C. Lupi; D. Averty; H.W. Gundel 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 117 KB

Sol-gel PZT and Mn-doped PZT thin films

Sol-gel PZT and Mn-doped PZT thin films for pyroelectric applications

✍ Zhang, Q; Whatmore, R W 📂 Article 📅 2001 🏛 Institute of Physics 🌐 English ⚖ 167 KB

PZT Thin Film Bi-Layer Devices for Phase

PZT Thin Film Bi-Layer Devices for Phase Controlled Actuation in MEMS

✍ D.F.L. Jenkins; W.W. Clegg; E. Cattan; D. Remiens 📂 Article 📅 2001 🏛 Springer US 🌐 English ⚖ 640 KB