PZT Thin Film Bi-Layer Devices for Phase Controlled Actuation in MEMS

✍ Scribed by D.F.L. Jenkins; W.W. Clegg; E. Cattan; D. Remiens

• Book ID: 110309946
• Publisher: Springer US
• Year: 2001
• Tongue: English
• Weight: 640 KB
• Volume: 7
• Category: Article
• ISSN: 1385-3449
• DOI: 10.1023/a:1012256108078