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Fabrication of 0.5-μm structures by dry electron lithography and anisotropic plasma etching

✍ Scribed by I. I. Amirov; V. A. Fedorov

Book ID: 110679276
Publisher: Springer
Year: 2000
Tongue: English
Weight: 632 KB
Volume: 29
Category: Article
ISSN: 1063-7397
DOI: 10.1007/bf02773282

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