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Fabrication and electrostatic actuation of thin diaphragms

โœ Scribed by Yang, E. H. ;Yang, S. S. ;Jeong, O. C.

Book ID
105665602
Publisher
Springer-Verlag
Year
1998
Tongue
Korean
Weight
832 KB
Volume
12
Category
Article
ISSN
1226-4865

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Fabrication and dynamic testing of electrostatic actuators with p+ silicon diaphragms
โœ E.H. Yang; S.S. Yang; S.W. Han; S.Y. Kim ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 602 KB

This paper presents the fabrication and testing of electrostatic actuators with \(\mathrm{p}^{+}\)diaphragms. The actuators consist of two counter electrodes which are fabricated on a silicon wafer and Pyrex glass, respectively. The \(\mathrm{p}^{+}\)diaphragm is used as a moving electrode, whereas