Fabrication and characterization of VO2thin films by direct current facing targets magnetron sputtering and low temperature oxidation

✍ Scribed by Jiran Liang; Ming Hu; Zhigang Liu; Lei Han; Tao Chen

• Book ID: 107626530
• Publisher: Tianjin University
• Year: 2008
• Tongue: Chinese
• Weight: 551 KB
• Volume: 14
• Category: Article
• ISSN: 1006-4982
• DOI: 10.1007/s12209-008-0031-9