Microstructure, optical and electrical properties of nitrogen doped sp2-rich a-C thin films grown by facing-target magnetron sputtering

✍ Scribed by J.Q. Wu; X.C. Wang; E.Y. Jiang; H.L. Bai

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 447 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2009.07.077