Fabrication and characterization of transparent conductive ZnO:Al thin films prepared by direct current magnetron sputtering with highly conductive ZnO(ZnAl2O4) ceramic target

✍ Scribed by Guojia Fang; Dejie Li; Bao-Lun Yao

• Book ID: 108341782
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 448 KB
• Volume: 247
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/s0022-0248(02)02012-2