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Fabrication and characterization of ZnxMg1−xO thin films by dc magnetron sputtering with a composite target of AZO and Mg

✍ Scribed by Fang, Guo-Jia ;Li, Dejie ;Zhao, Xinzhong

Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
502 KB
Volume
200
Category
Article
ISSN
0031-8965

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Superconducting Bi-Sr-Ca-Cu-O and Bi(Pb)-Sr-Ca-Cu-O f'flms (0.03-2.5t~m) are prepared by deposition onto MgO (200) single crystal substratesin a DC single target sputtering system (pure Ar plasma) and post-deposition anneal. Annealing condition studies show that the Tc values are very dependent on t