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Fabrication and characterization of sputtered titanium dioxide films

โœ Scribed by A.A. Akl; H. Kamal; K. Abdel-Hady


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
445 KB
Volume
252
Category
Article
ISSN
0169-4332

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Arsenic doped p-type ZnO thin films were grown on sapphire substrate by magnetron sputtering. As grown films reveal p-type conduction confirmed by Hall-effect and photoluminescence measurements. The p-type film with a hole concentration of 2.16ร— 10 17 cm -3 , mobility of 1.30 cm 2 /V.s and resistivi