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Fabrication and characterization of rf sputtered oxide films

✍ Scribed by Abhai Mansingh

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 116 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)91359-v

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