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Fabrication and characterization of a microelectromechanical tunable capacitor

✍ Scribed by Ching-Liang Dai; Shih-Chieh Lin; Ming-Wei Chang

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 962 KB
Volume: 38
Category: Article
ISSN: 0026-2692
DOI: 10.1016/j.mejo.2007.09.026

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