A tunable capacitor using a finger patterned electrode

✍ Scribed by Young Chul Lee; Kyung Hyun Ko

• Publisher: John Wiley and Sons
• Year: 2009
• Tongue: English
• Weight: 440 KB
• Volume: 51
• Category: Article
• ISSN: 0895-2477
• DOI: 10.1002/mop.24108

✦ Synopsis

Abstract

Using a lead zinc niobate (PZN) thin film dielectric, a tunable metal‐insulator‐metal (MIM) capacitor is presented and investigated in this article. To improve its tunability and bias characteristics, the finger patterned electrode in the top metal is devised. The capacitors were fabricated on a low‐resistivity Si substrate employing lead zinc niobate (PZN) thin film dielectric. The fabricated capacitor, whose line width and spacing was 2.5 and 2.0 μm, respectively, achieved the effective capacitance tunability of 22.9% at 5.5 V. This achieved tunability is higher value of 10% than that of the conventional rectangular MIM capacitor at 900 MHz. © 2008 Wiley Periodicals, Inc. Microwave Opt Technol Lett 51: 418–421, 2009; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.24108