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Experimental study about gate oxide damages in patterned MOS capacitor irradiated with heavy ions

✍ Scribed by G. Busatto; G. Currò; F. Iannuzzo; A. Porzio; A. Sanseverino; F. Velardi


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
865 KB
Volume
49
Category
Article
ISSN
0026-2714

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