An RF MEMs microelectromechanical system variable capacitor has been demonstrated with a 22:1 tuning range, tuning from 1.5 to 33.2 pF of capacitance. This capacitor was constructed using bistable MEMs membrane capacitors with individual tuning ranges of 70:1 to 100:1, control voltages in the 30-55
A probabilistic design optimization for MEMS tunable capacitors
โ Scribed by M. Shavezipur; K. Ponnambalam; S.M. Hashemi; A. Khajepour
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 549 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0026-2692
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