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Distributed MEMS transmission lines for tunable filter applications

โœ Scribed by Yu Liu; Andrea Borgioli; Amit S. Nagra; Robert A. York

Publisher
John Wiley and Sons
Year
2001
Tongue
English
Weight
398 KB
Volume
11
Category
Article
ISSN
1096-4290

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โœฆ Synopsis

This paper describes the design and fabrication of a distributed MEMS ( ) transmission line DMTL , used to realize a transmission-line with a voltage-variable electrical length for microwave circuits. The DMTL is a coplanar waveguide periodically loaded with continuously-variable MEMS capacitors. A tunable bandpass filter was designed and fabricated on 700 m thick glass substrates using three capacitively coupled DMTL sections as variable shunt resonators. The measured results demonstrate a 3.8% tuning range at 20 GHz with 3.6 dB minimum insertion loss. Issues for future improvement are discussed.

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