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Circuit modeling of micromachined transitions for MEMS tunable filters

✍ Scribed by Yongshik Lee; Alexandros Margomenos

Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
176 KB
Volume
49
Category
Article
ISSN
0895-2477

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✦ Synopsis

Abstract

This letter presents circuit modeling of micromachined transitions for interconnecting Coplanar Waveguides (CPW) on silicon to microstrip lines suspended on low‐loss membranes. The transition plays a critical role in developing MEMS tunable high‐Q filters for Ka‐ and U‐band applications. Exact circuit modeling of the transitions provides methods to design such structures without full‐wave simulations. Comparisons between the circuit model results and full‐wave simulation results, as well as the experimental results are presented. © 2006 Wiley Periodicals, Inc. Microwave Opt Technol Lett 49: 477–478, 2007; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22155

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