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RF MEMs variable capacitors for tunable filters

✍ Scribed by Charles L. Goldsmith; Andrew Malczewski; Zhimin J. Yao; Shea Chen; John Ehmke; David H. Hinzel

Publisher
John Wiley and Sons
Year
1999
Tongue
English
Weight
989 KB
Volume
9
Category
Article
ISSN
1096-4290

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✦ Synopsis

An RF MEMs microelectromechanical system variable capacitor has been demonstrated with a 22:1 tuning range, tuning from 1.5 to 33.2 pF of capacitance. This capacitor was constructed using bistable MEMs membrane capacitors with individual tuning ranges of 70:1 to 100:1, control voltages in the 30-55 V range, switching speeds less than 10 S, and operating frequencies as high as 40 GHz. These devices may eventually provide a viable alternative to electronic varactors with improved tuning range and lower loss.

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