Tunable coplanar Bal \_sr,TiO, (BSTO) thin-film capacitors with superconducting Tl-Ba-Ca-Cu-0 (22 12 ) electrodes have been successfully prepared using RF sputtering onto LaAIOs (100) substrates. The capacitors were fabricated in a five-step process consisting of: deposition of a Ba2CaCu20x precurso
Fabrication and characterization of Ba1−xSr1−xTiO3 tunable thin film capacitors
✍ Scribed by Abdelkader Outzourhit; John U. Trefny; Tomoko Kito; Baki Yarar; Ali Naziripour; Allen M. Hermann
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 761 KB
- Volume
- 259
- Category
- Article
- ISSN
- 0040-6090
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