Extremely low temperature growth of ZnO by atomic layer deposition

✍ Scribed by Guziewicz, E.; Kowalik, I. A.; Godlewski, M.; Kopalko, K.; Osinniy, V.; Wójcik, A.; Yatsunenko, S.; Łusakowska, E.; Paszkowicz, W.; Guziewicz, M.

• Book ID: 120487852
• Publisher: American Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 745 KB
• Volume: 103
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.2836819