✦ LIBER ✦

Experimental study of the influence of nanoparticle generation on the electrical characteristics of argon–silane capacitive radio-frequency plasmas

✍ Scribed by Shen, Zhe; Kortshagen, Uwe

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Optical Emission Spectroscopy Used to St

✍ ParthaPratim Ray; Partha Chaudhuri 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 146 KB

Influence of the Generator Frequency on

✍ Capelle, B.; Mermet, J. M.; Robin, J. 📂 Article 📅 1982 🏛 Society for Applied Spectroscopy 🌐 English ⚖ 527 KB

The influence of erbium on electrical an

✍ E. I. Terukov; M. M. Kazanin; O. I. Kon’kov; V. Kh. Kudoyarova; K. V. Kougiya; Y 📂 Article 📅 2000 🏛 Springer 🌐 English ⚖ 95 KB

Influence of the low-frequency source pa

✍ Xiang Xu; Hao Ge; Shuai Wang; Zhongling Dai; Younian Wang; Aimin Zhu 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 851 KB

The effects of process conditions on the

✍ Liu, Xiang-Mei; Song, Yuan-Hong; Jiang, Wei; Yi, Lin 📂 Article 📅 2013 🏛 IOP Publishing 🌐 English ⚖ 937 KB

Influence of dual-frequency plasma-enhan

✍ W. S. Tan; P. A. Houston; G. Hill; R. J. Airey; P. J. Parbook 📂 Article 📅 2004 🏛 Springer US 🌐 English ⚖ 156 KB