Experimental investigation into the use of micro-extraction fields for electron beam testing

✍ Scribed by Anjam Khursheed; Sek Poh Goh

• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 955 KB
• Volume: 34
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(97)00002-6

✦ Synopsis

In the electron beam testing of integrated circuits, local transverse electric fields cause error to voltage measurements. Presently, the solution is to place a i-5 kV voltage extraction electrode a few millimetres above the specimen. An alternative method is to use a micro-extraction electrode that is of the same size as the structures to be probed. This paper describes an experimental investigation made into several types of micro-extraction layouts, and shows that they can be used to provide reliable voltage contrast measurements.