In the electron beam testing of integrated circuits, local transverse electric fields cause error to voltage measurements. Presently, the solution is to place a i-5 kV voltage extraction electrode a few millimetres above the specimen. An alternative method is to use a micro-extraction electrode that
โฆ LIBER โฆ
A theoretical investigation of the stepped-field configuration used for focussing positron beams
โ Scribed by D.E. Lobb
- Publisher
- Elsevier Science
- Year
- 1967
- Weight
- 749 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0029-554X
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