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Experimental evidence for the presence of segregation and relaxation gettering of iron in polycrystalline silicon layers on silicon

โœ Scribed by Istratov, A. A.; Huber, W.; Weber, E. R.


Book ID
125427203
Publisher
American Institute of Physics
Year
2004
Tongue
English
Weight
298 KB
Volume
85
Category
Article
ISSN
0003-6951

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