✦ LIBER ✦

Experimental and thermodynamical investigation of selective low pressure chemical vapour deposition of tungsten using WCl6 as tungsten source

✍ Scribed by Anders Hårsta; Jan-Otto Carlsson

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Selective low pressure chemical vapour d

✍ H. Ko¨rner 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 841 KB

Thermodynamic investigation of selective

✍ Jan-Otto Carlsson; Anders Hårsta 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 655 KB

Growth kinetics of low pressure chemical

✍ A.S Turtsevich; V.Y Krasnitsky; V.I Granko; V.P Lesnikova; I.V Smal; O.E Saryche 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 918 KB

Low pressure chemical vapor deposition o

✍ H.L. Park; S.S. Yoon; C.O. Park; J.S. Chun 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 412 KB

The adhesion of low pressure chemically

✍ Y.W. Park; C.O. Park; John S. Chun 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 619 KB