Thermodynamic investigation of selective tungsten chemical vapour deposition: Influence of growth conditions and gas additives on the selectivity in the fluoride process

✍ Scribed by Jan-Otto Carlsson; Anders Hårsta

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 655 KB
• Volume: 158
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(88)90307-0