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Thermodynamic investigation of selective molybdenum chemical vapour deposition: Influence of growth conditions and gas additives on the selectivity of the process

✍ Scribed by Anders HÅrsta; Jan-Otto Carlsson

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 581 KB
Volume: 185
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(90)90088-u

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