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Experimental and theoretical investigation of phosphorus in-situ doping of germanium epitaxial layers

✍ Scribed by Yu, Hyun-Yong; Battal, Enes; Okyay, Ali Kemal; Shim, Jaewoo; Park, Jin-Hong; Baek, Jung Woo; Saraswat, Krishna C.

Book ID: 122037873
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 374 KB
Volume: 13
Category: Article
ISSN: 1567-1739
DOI: 10.1016/j.cap.2013.02.021

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