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Optical and electrical properties of heavily phosphorus‐doped epitaxial silicon layers

✍ Scribed by Lubberts, G.; Burkey, B. C.

Book ID: 118066082
Publisher: American Institute of Physics
Year: 1984
Tongue: English
Weight: 478 KB
Volume: 55
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.333109

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