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Experimental and numerical investigations of photomask substrate heating due to electron beam patterning

✍ Scribed by B. Shamoun; D. Trost

Book ID: 108411106
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 294 KB
Volume: 53
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(00)00317-8

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