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Excimer laser doping using highly doped silicon nanoparticles

✍ Scribed by Meseth, Martin; Kunert, Bernd Christian; Bitzer, Lucas; Kunze, Frederik; Meyer, Sebastian; Kiefer, Fabian; Dehnen, Martin; Orthner, Hans; Petermann, Nils; Kummer, Malin; Wiggers, Hartmut; Harder, Nils-Peter; Benson, Niels; Schmechel, Roland

Book ID: 120959368
Publisher: John Wiley and Sons
Year: 2013
Tongue: English
Weight: 575 KB
Volume: 210
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.201329012

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