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Excimer-laser doping of spin-on dopant in silicon

✍ Scribed by Y.W. Wong; X.Q. Yang; P.W. Chan; K.Y. Tong

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 357 KB
Volume: 64
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90032-7

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