Polycrystalline silicon recrystallized with excimer laser irradiation and impurity doping using ion doping method

✍ Scribed by Miyata, Yutaka; Furuta, Mamoru; Yoshioka, Tatsuo; Kawamura, Tetsuya

• Book ID: 120032871
• Publisher: American Institute of Physics
• Year: 1993
• Tongue: English
• Weight: 937 KB
• Volume: 73
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.352974