Electrical and structural characterization of silicon layers directly doped with boron by excimer laser irradiation

✍ Scribed by R. Nipoti; M. Bianconi; R. Fabbri; M. Servidori; S. Nicoletti; R. Canteri

• Book ID: 107925745
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 266 KB
• Volume: 43
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(89)90233-x